Chairs & Speakers
Honorary Chair:
- Prof. Zhuangde Jiang, Academician of Chinese Academy of Engineering
Conference chair:
- Prof. Yang Shuming, Xi 'an Jiaotong University, China
Co-Chair:
- Prof. Yiting Yu, Northwestern Polytechnical University, China
- Prof. Huigao Duan, Hunan University, China
- Prof. Ryutaro Maeda, Xi 'an Jiaotong University, China
- Technical Program Committee Chair:
- Prof. Xichun Luo, School of Computing and Engineering, University of Strathclyde, UK
- Publication Chair:
- Prof. Zonghua Zhang, School of Mechanical Engineering, Hebei University of Technology, China
- Local Committee Chair:
- Chairman: Prof. Shuhai Jia, Xi 'an Jiaotong University, China
- Co-Chair: A/Prof. Tao Liu, Xi 'an Jiaotong University, China
Plenary Speaker:
- Prof. Min Gu, Foreign member of Chinese Academy of Engineering;Fellow of Australian Academy of Science and Australian Academy of Technology and Engineering
- Prof. Minghui Hong, Department of Electrical & Computer Engineering of the National University of Singapore
- Prof. Shiyuan Liu, Huazhong University of Science and Technology
Report title: Metrology and Inspection for IC manufacturing: State-of-the-art, challenges, and future trends
Invited Speakers:
- Prof. Jiwang Yan, Keio University, Japan
- Prof. Xichun Luo, University of Strathclyde, UK
- Prof. Benny Cheung, The Hong Kong Polytechnic University, Hong Kong, China
- Prof. Lingbao Kong, Fudan Univrsity, China
- Dr. Feng Gao, University of Huddersfield, UK
- Dr. Ping Yang, Institute of Optics and Electronics, Chinese Academy of Sciences, China
- Dr. Guanhao Wu, Tsinghua University, China
- Dr. Xiangchao Zhang, Fudan University, China
- Prof. Tao Li, Nanjing University, China
- Prof. Xiaokang Liu, Chongqing University of Technology, China
- Prof. Dong Wu, University of Science and Technology of China
- Dr. Liangcai Cao, Tsinghua University, China
- Prof. Yiting Yu, Northwestern Polytechnical University, China
- Dr. Tao Liu, Xi’an Jiaotong University, China
- Prof. Yongbo Deng, Changchun Institute of Optics, Fine Mechanics and Physics (CIOMP), Chinese Academy of Sciences, Changchun, China